Manufacturing technologies and micro/nanotechnologies

This paper presents the main technologies / processes / procedures specific for the manufacture of miniaturized (micro-nano) scale structures, with an emphasis on micromechanical / microelectronic structures (MEMS) that are obtained through technological processes similar to those encountered in the manufacture of integrated circuits and in the electronics industry or through technologies and processes that are applicable exclusively to structures of this size order (micrometric / submicrometric). Even though the emphasis is on the manufacturing technologies of micromechanical structures / components, attention is also paid to aspects regarding the manufacture of electronic / microelectronic components.